ALD Precursor Design for Hard to Deposit Metals with Chuck Winter - ALD Stories Ep. 6
Tyler sits down with Wayne State University’s Chuck Winter to talk about his approach to designing precursors for ALD. Chuck explains what makes a good ALD precursor and how elegant organic chemistry can enable ALD processes for hard-to-deposit metals, like cobalt and aluminum. Learn more about Chuck’s research here: http://www.clas.wayne.edu/wintergroup/ Papers mentioned in this episode: https://doi.org/10.1021/acs.chemmater.7b02456 - Co metal ALD https://doi.org/10.1021/acs.chemmater.8b00445 - Al metal ALD