Area-Selective Approaches for Atomic Layer Processing with Mikko Ritala – ALD Stories Ep 10
In the 10th installment of ALD Stories, Tyler meets up with Professor Mikko Ritala at the University of Helsinki. A professor of chemistry and renowned ALD scientist, Mikko has been working with ALD since the 90s. Following a stellar lab tour, Tyler and Mikko discuss ALD activities at the University of Helsinki, including their new tools, work on area-selective processing and partnership with ASM Microchemistry. In this video: 00:00 – Intro 02:30 – The Ritala Lab 09:33 – ALD in the Past 17:05 – Helsinki ALD Cluster Tool 24:26 – Area-Selective ALD & ALE 43:36 – Partnership with ASM 47:49 – Ending & Outro Follow Mikko and the Helsinki ALD Group on Twitter at @mikkoritala & @HelsinkiALD Read about the Helsinki ALD Group’s work here: https://www2.helsinki.fi/en/researchgroups/helsinkiald Follow Tyler on Twitter @TyMyTheALDGuy