History of ALD
We meet Professor Riikka Puurunen of Aalto University in Finland, and discuss the history of ALD and other topics close to her heart. You may also wish to check out the articles we mentioned on this episode: A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy, Riikka Puurunen https://onlinelibrary.wiley.com/doi/full/10.1002/cvde.201402012 From V. B. Aleskovskii's “Framework” Hypothesis to the Method of Molecular Layering/Atomic Layer Deposition, Anatolii A. Malygin et al. https://doi.org/10.1002/cvde.201502013